FEBIP Homepage

Welcome to the webpages dedicated to Focused Electron Beam Induced Processes (FEBIP).

This website is dedicated to nanopatterning by chemical reactions (deposition and etching) triggered by a focused electron beam. This nanostructuring approach is resistless and maskless has an experimentally proven limit of detection below 1 nm.

This website provides you with background information on FEBIP, an extensive database with references to literature for further reading, as well as information about past and future workshops. Finally, there is a list of people interested and/or working in the field of FEBIP.

Future Workshop:

The 10-year Anniversary Workshop on Focused Electron Beam Induced Processing FEBIP - 2016 will be held from 6th of July till 8th of July 2016. This biennial meeting addresses the entire FEBIP community and will be take place in Vienna, Austria.

For more information, download the First Announcement of FEBIP 2016

Future Conference/Symposium

Three sessions on "Beam Induced Deposition and Etching" will be held at the EIPBN 2015 in San Diego, CA , USA from May 26-29, 2015.EIPBN Conference Link

A dedicated symposium on "Focused electron beam induced processing" will be held at the EuroCVD 20  in Sempach, Switzerland from July 13-17, 2015. EuroCVD 20

A symposium on “Electron-Molecule Collisions and Swarms” will be held at the POSMOL 2015 will  in Lisboa, Portugal from 17-20 July, 2015. POSMOL Link

A meeting on “Application of novel precursors in the FEBID process” and further FEBIP sessions are planned at the MNE 2015 in The Hague, Netherlands from September 21-24, 2015 MNE 2015 Link

Past Workshops:

Up to now 5 FEBIP workshops were held to serve the community.

1st FEBIP workshop: Delft, Netherlands in June 2006
2nd FEBIP workshop: Thun, Switzerland in July 2008
3rd FEBIP workshop:  Albany, USA in July, 2010
4th FEBIP workshop:  Zaragoza, Spain in 2012        

5th FEBIP Workshop: Frankfurt, Germany in 2014                                                                                                         

Past Conference/Symposium

FEBIP will be the main topic of the second meeting of COST Action CELINA held in Bratislava, Slovakia from May 6-9, 2015. Link

For further details go to the section Meetings.