Welcome to the webpages dedicated to Focused Electron Beam Induced Processes (FEBIP).
This website is dedicated to nanopatterning by chemical reactions (deposition and etching) triggered by a focused electron beam. This nanostructuring approach is resistless and maskless has an experimentally proven limit of detection below 1 nm.
This website provides you with background information on FEBIP, an extensive database with references to literature for further reading, as well as information about past and future workshops. Finally, there is a list of people interested and/or working in the field of FEBIP.
Up to now 5 FEBIP workshops were held to serve the community.
1st FEBIP workshop: Delft, Netherlands in June 2006
2nd FEBIP workshop: Thun, Switzerland in July 2008
3rd FEBIP workshop: Albany, USA in July, 2010
4th FEBIP workshop: Zaragoza, Spain in 2012 5th FEBIP Workshop: Frankfurt, Germany in 2014
Please check the "Workshop" page for more information about past workshops.
6th FEBIP workshop will be held in Vienna, Austria in 2016.
A dedicated FEBIP mini symposium "Nanomaterials I: Nanofabrication using focused electrons and ions beams" will be held at Condensed Matter (CMD25) in Paris, Aug 24 - 29, 2014. Link
Low Energy Electron Workshop will be held on November 4, 2014. LEELIS site