FEBIP Homepage

Welcome to the webpages dedicated to Focused Electron Beam Induced Processes (FEBIP).

This website is dedicated to nanopatterning by chemical reactions (deposition and etching) triggered by a focused electron beam. This nanostructuring approach is resistless and maskless has an experimentally proven limit of detection below 1 nm.

This website provides you with background information on FEBIP, an extensive database with references to literature for further reading, as well as information about past and future workshops. Finally, there is a list of people interested and/or working in the field of FEBIP. If you want to be informed of future events related to FEBIP, please register as a member by sending an email to FEBIP-TNW&tudelft.nl (replace & by @). Your name will then be added to the members list.

Past Workshops:

Up to now 4 FEBIP workshops were held to serve the community.
1st FEBIP workshop: Delft, Netherlands in June 2006
2nd FEBIP workshop: Thun, Switzerland in July 2008
3rd FEBIP workshop:  Albany, USA in July, 2010
4th FEBIP workshop:  Zaragoza, Spain in 2012

Please check the "Workshop" page for more information about past workshops.


5th workshop on Focused Electron Beam Induced Processing (FEBIP 2014) will be held in Frankfurt am Main, Germany, from July 22nd to 24th 2014.FEBIP 2014 Website

Future Symposium

A dedicated FEBIP mini symposium "Nanomaterials I: Nanofabrication using focused electrons and ions beams" will be held at Condensed Matter (CMD25) in Paris, Aug 24 - 29, 2014. Link


To contact the FEBIP steering committee, please send an email to c.w.hagen(at)tudelft.nl (replace (at) by @).

Kees Hagen
Head of the FEBIP steering committee