FEBIP Homepage

Welcome to the webpages dedicated to Focused Electron Beam Induced Processes (FEBIP).

This website is dedicated to nanopatterning by chemical reactions (deposition and etching) triggered by a focused electron beam. This nanostructuring approach is resistless and maskless has an experimentally proven limit of detection below 1 nm.

This website provides you with background information on FEBIP, an extensive database with references to literature for further reading, as well as information about past and future workshops.

Future Workshop:

The 10-year Anniversary Workshop on Focused Electron Beam Induced Processing FEBIP - 2016 will be held from 5th of July till 8th of July 2016. This biennial meeting addresses the entire FEBIP community and will be take place in Vienna, Austria.

Download the First Announcement of FEBIP 2016

For more information,Please visit the FEBIP 2016 website

Future Conference/Symposium

Perspectives of carbon-containing FEBID precursors

Location: Bremen, Germany
Date:March 1, 2016
Flyer of the workshop

CELINA 2016: Third meeting of COST Action

Location: Krakow, Poland
Date: May 18-20, 2016
Jointly with the fifth Meetings of Working Groups 1, 2, and 3 of CELINA.

Past Workshops:

Up to now 5 FEBIP workshops were held to serve the community.

1st FEBIP workshop: Delft, Netherlands in June 2006
2nd FEBIP workshop: Thun, Switzerland in July 2008
3rd FEBIP workshop:  Albany, USA in July, 2010
4th FEBIP workshop:  Zaragoza, Spain in 2012    

5th FEBIP Workshop: Frankfurt, Germany in 2014                                                                                                        

For further details go to the section Meetings.